JPH0325074Y2 - - Google Patents
Info
- Publication number
- JPH0325074Y2 JPH0325074Y2 JP19336686U JP19336686U JPH0325074Y2 JP H0325074 Y2 JPH0325074 Y2 JP H0325074Y2 JP 19336686 U JP19336686 U JP 19336686U JP 19336686 U JP19336686 U JP 19336686U JP H0325074 Y2 JPH0325074 Y2 JP H0325074Y2
- Authority
- JP
- Japan
- Prior art keywords
- area
- hepa filter
- work area
- ceiling
- process area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 28
- 238000007664 blowing Methods 0.000 claims description 14
- 230000007423 decrease Effects 0.000 claims description 4
- 210000000744 eyelid Anatomy 0.000 description 9
- 238000011109 contamination Methods 0.000 description 2
- 238000012864 cross contamination Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19336686U JPH0325074Y2 (en]) | 1986-12-16 | 1986-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19336686U JPH0325074Y2 (en]) | 1986-12-16 | 1986-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399141U JPS6399141U (en]) | 1988-06-27 |
| JPH0325074Y2 true JPH0325074Y2 (en]) | 1991-05-31 |
Family
ID=31149323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19336686U Expired JPH0325074Y2 (en]) | 1986-12-16 | 1986-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325074Y2 (en]) |
-
1986
- 1986-12-16 JP JP19336686U patent/JPH0325074Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6399141U (en]) | 1988-06-27 |
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